For electrical properties of MOS capacitors, the C-V curves were obtained by LCR meter (HP4284A), and picoampere meter (HP4140B) was used to measure the J-V curves.

另外以电感电容电阻计量仪(HP4284A)进行C-V曲线量测；以微安培计量仪(HP4140B)进行J-V曲线量测。